0 part(s), total €0.00
Connection flange | DN 16 CF |
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Actuator |
|
Number of screws | 6 pcs. |
Bakeout temperature: actuator | 60 °C |
Bakeout temperature: actuator, position indicator | 60 °C |
Bakeout temperature: actuator, pilot valve | 60 °C |
Bakeout temperature: housing | 200 °C |
Bakeout temperature: valve open, under vacuum | 200 °C |
Bakeout temperature: valve closed | 150 °C |
Tightness | 1 · 10-9 mbar l/s |
Tightness: Valve seat | 1 · 10-9 mbar l/s |
Seal: Housing | Copper |
Seal: Valve seat | FKM |
Differential pressure in opening direction | 1000 hPa |
Differential pressure in closing direction | 1000 hPa |
Pressure max. (absolute) | 1000 hPa |
Pressure min. | 1 · 10-10 hPa |
Compressed air (overpressure) | 4 500 – 6 000 hPa |
Compressed air volume | 28 cm³ |
Feedthrough |
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Input voltage(s) | 24 V DC |
Housing |
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Weight | 1 kg |
Thread | M 4 |
Thread depth | 6 mm |
Power consumption | 24 V DC / 4.5 W |
Conductance value with molecular flow | 12 l/s |
Opens against differential pressure of | 30 hPa |
Closing/opening time | 1.5 s/1.5 s |
Service life | 100000 cycles |
Position indicator |
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Control valve | Included |
Type | UHV gate valve |
Valve plate | Stainless steel 1.4301 (AISI 304) |
A | 61 mm |
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B | 44 mm |
C | 39.6 mm |
D | 25 mm |
E | 65 mm |
F | 48 mm |
G | 33 mm |
H | 33.8 mm |
N | 6 x M4x6 mm |